A review of parametric resonance in microelectromechanical systems
نویسندگان
چکیده
منابع مشابه
Tunable Microelectromechanical Filters that Exploit Parametric Resonance
Background: This paper describes an analytical study of a bandpass filter that is based on the dynamic response of electrostatically-driven MEMS oscillators. Method of Approach: Unlike most mechanical and electrical filters that rely on direct linear resonance for filtering, the MEM filter presented in this work employs parametric resonance. Results: While the use of parametric resonance improv...
متن کاملGeneralized Parametric Resonance in Electrostatically-Actuated Microelectromechanical Oscillators
This paper investigates the dynamic response of a class of electrostatically-driven microelectromechanical (MEM) oscillators. The particular systems of interest are those which feature parametric excitation that arises from forces produced by fluctuating voltages applied across comb drives. These systems are known to exhibit a wide range of behaviors, some of which have escaped explanation or p...
متن کاملReview of modeling electrostatically actuated microelectromechanical systems
A wide range of microelectromechanical systems (MEMSs) and devices are actuated using electrostatic forces. Multiphysics modeling is required, since coupling among different fields such as solid and fluid mechanics, thermomechanics and electromagnetism is involved. This work presents an overview of models for electrostatically actuated MEMSs. Three-dimensional nonlinear formulations for the cou...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Nonlinear Theory and Its Applications, IEICE
سال: 2013
ISSN: 2185-4106
DOI: 10.1587/nolta.4.198